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Semiconductor Processing & Fabrication

Proposed Q&A site for researchers, scientists, engineers, and students working on design, fabrication, and testing of semiconductor materials and devices
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<comments removed> If you have any questions or comments for this proposal, please use 'create new discussion' below. Thanks. – Robert Cartaino♦ Dec 11 '12 at 13:31
In order to popularize SP&F, our Facebook, Twitter, and Google+ sites have been launched! See the new discussion for links. – sputter Jan 9 at 20:33
Reminder: if you are interested in this proposal, please be sure to follow, vote for some of the questions below, and post examples of your own. – sputter Feb 8 at 18:25

8 Example Questions

active oldest votes
up vote 5 down vote
What are the advantages of sputter deposition over evaporation? Why would one choose one or the other?
added by sputter Dec 11 '12 at 5:07
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up vote 4 down vote
How would one measure the temperature of the substrate during sputtering? How do you make sure that you're measuring not the surroundings?
added by sputter Dec 11 '12 at 4:06
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up vote 3 down vote
Are there any significant advantages to using Pulsed laser deposition over sputter deposition for [this material]?
added by Mark Booth Dec 12 '12 at 10:18
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up vote 3 down vote
How do I measure the thickness of non-transparent thin films?
added by Curt Jan 24 at 22:10
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up vote 2 down vote
In a vacuum deposition process, why does the mean free path need to be much larger than the dimensions of the chamber?
added by sputter Dec 11 '12 at 4:02
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up vote 2 down vote
How does a cryopump/compressor system work? What is the role of the compressor in this system? Why does such a system need a roughing pump?
added by sputter Dec 11 '12 at 20:23
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up vote 2 down vote
What metrology method is best for measuring the thickness of thin film X.
added by Curt Jan 24 at 22:11
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up vote 1 down vote
How do the positions of the sputtering / evaporation guns affect deposition rate of a thin film?
added by sputter Apr 22 at 21:57
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